Data-Over-Sound With PMUTs

Data-over-sound is an emerging technology for digital communication which uses frequencies at the upper bounds of human hearing, usually between 15 kHz to 25 kHz. We report a successful development Piezoelectric Micromachined Ultrasound Transducers (PMUTs) low-power data-over-sound applications. thin films used in PMUTs can have high residual tensile stresses ranging from 300MPa 1.5GPa. These effect increasing resonant transducers, making it challenge fabricate low frequency devices. Using optimum dimensions by estimating net stress fabricated diaphragms, transducers suitable range 17 21 were fabricated, capable generating as much 83 dB sound pressure level distance 5 cm continuous operation.